Hermotech Co., Ltd. is exhibited KUMADE-FORK (EC type) at SEMICON Japan 2022.
website：https://harmotec.com/
Harmotech Co., Ltd.
Our company is a manufacturer specializing in special Uehara transportation.
This time, we will explain the EC type.
Our company is a manufacturer specializing in special Uehara transportation.
This time, we will explain the EC type.
In fact, this will be an EC type exhibit.
The EC type is newly developed by our company for transporting the highest wafers of 300mm. When
it comes to large-diameter wafers of 300 mm, it is difficult to transfer them without contact because of the large deflection due to their own
weight
. , so that the exhaled air and the area exhaled by swirling flow come to the root side, and
conversely, the air exhaled by the root is made to come to the tip side, and the air repulsion is created in this central part. It generated a force to fight.
By doing so, you can push up the TAIKO wafer that is bent by its own weight.
In addition, TAIKO’s front side, back side, today’s back side, and inversion are available.
In addition to thin TAIKO wafers, we can also handle fair wafers, bonded wafers, and thick wafers.
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